MEMS BASED THERMAL MICROACTUATOR
Dr. M.Saravanan1, G.V.Sunil Kumar2
1,2Department of Electronics and Instrumentation Engineering, SreeVidyanikethan Engineering College, A.Rangampet, Tirupati,India.
Source of energy for the MEMS devices became the unavoidable requirement for any application. Even though many renewable energy sources are available, the optimal utilization of those resources are not attained till now. This paper presents a design and implementation of Passive MEMS based voltage generation using temperature. The design is made with two stages, in the first part the temperature is converted to displacement using Micro actuators and then in the second stage the displacement is converted to pressure and then to voltage using piezoelectric sensors. It is simulated using COMSOL multiphysics software at a temperature of 100o C.
